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Suspended Membrane InGaAs Photonic Crystal Waveguides for ammonia sensing at λ=6.15μm

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Abstract

Fully suspended InGaAs waveguide devices with holey photonic crystal waveguides (HPCWs) are designed for mid-infrared sensing at λ=6.15μm in the low index contrast InGaAs-InP platform. We experimentally detect 5ppm ammonia in 1mm long suspended HPCWs.

© 2019 The Author(s)

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