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Conferences > CLEO_SI > 2019 > STh3N > STh3N.4

Hybrid Silicon-Conductive Oxide Microring Resonators with 261pm/V Tunability

Behzad Ashrafi Nia, Erwen Li, Bokun Zhou, and Alan X. Wang

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Abstract

We designed and demonstrated a silicon microring filter with indium-tin oxide gate as the electric-tuning electrode. It achieved ultra-large resonance wavelength tunability of 261pm/V, which is obtained through the high-K HfO2 insulated capacitor.

© 2019 The Author(s)

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