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Extremely Wide Field of View Tabletop Ptychographic Imaging with 12.7 nm Illumination

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Abstract

We demonstrate the first reflection-mode, tabletop imaging using 12.7nm illumination via ptychography. This is the first reflection-mode image using any ~13nm source of a general sample. We utilize glancing incidence-angles to obtain a large field-of-view.

© 2017 Optical Society of America

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