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Conferences > DH > 2014 > DTh1B > DTh1B.2

Wide-field diffraction phase microscope for precision metrology

Gannavarpu Rajshekhar, Basanta Bhaduri, Chris Edwards, Renjie Zhou, Lynford L. Goddard, and Gabriel Popescu

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Abstract

We demonstrate a wide-field diffraction phase microscope for large field of view quantitative phase imaging. The instrument provides an extremely stable, single-shot, full-field and robust imaging modality for nanoscale metrology and SLM characterization.

© 2014 Optical Society of America

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