Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (Optica Publishing Group, 2004),
  • paper DSuC3
  • https://doi.org/10.1364/DOMO.2004.DSuC3

Deep-UV microscopy based on a hybrid diffractive/refractive lens system

Not Accessible

Your library or personal account may give you access

Abstract

A hybrid microscope system was developed and used to inspect lithography-masks at 193 nm. The realization of the DOE as most critical element involves both, high frequency lithography and an additional ion etching process.

© 2004 Optical Society of America

PDF Article
More Like This
Diffractive/refractive hybrids for blue LD optical storage

Yuichiro Ori, Kyu Takada, Junji Hashimura, and Nobuo Mushiake
DTuA1 Diffractive Optics and Micro-Optics (DOMO) 2004

Recent achievements on ion beam techniques for optics fabrication

A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, and B. Rauschenbach
OMD3 Optical Fabrication and Testing (OF&T) 2004

Laser micromachining by UV, deep UV and fs lasers

Jim Fieret
PTuE2 Photonic Applications Systems Technologies Conference (CLEO:A&T) 2004

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved