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  • 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper ej_p_15

Stability Condition Prediction of Integrated Opto-Mechanical Phaseshifters Using Finite Element Analysis

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Abstract

Opto-mechanical gradient forces (Fom) can deflect suspended nano beams forming a slot waveguide. This deflection affects the distance between suspended beams and thus modifies the waveguide cross section. The changed waveguide cross section will modulate the effective refractive index (neff) and induces optical phaseshifts [1]. A slot waveguide in this work refers to a system of two parallel and suspended clamped beams, namely a relatively wide waveguide (WG), and a narrow nanostring (NS) of the same thickness as shown in (Fig. 1A).

© 2019 IEEE

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