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Direct Mid-Infrared Frequency Comb Spectroscopy of Nitrocarburizing Plasma Processes

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Abstract

We report on mid-infrared broadband direct frequency comb spectroscopy as a novel plasma diagnostic applied to spectroscopic investigations of plasma nitrocarburizing processes. We discuss the parameter-dependent behavior of species like HCN, CH4, and NH3.

© 2018 The Author(s)

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