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Fabrication of microlens and microlens array using CO2 laser and characterization of formation process

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Abstract

Microlenses and microlens arrays were formed directly on a surface of a glass plate by using a CO2 laser. This method has the merit of complete dry processing. We discuss about the formation mechanism and process through the characterization of the composition and refractive index distribution within the microlens.

© 2003 Optical Society of America

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