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Special Near-field Scanning Optical Microscope for the measurement of optical waveguide devices

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Abstract

We developed the specially-designed NSOM to analysis characteristics of the various photonic devices. Hereby present some measured results. First, we measured the evanescent field near the core-cladding interface of a channel waveguides with an air and a solid cladding. Next, the focusing characteristics of focusing waveguide grating coupler were measured.

© 2003 Optical Society of America

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