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High Resolution Material Processing with Femtosecond Lasers: Mask Repair and Beyond

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Abstract

Femtosecond pulses of light merged with deep ultraviolet optics results in materials processing with exceptional, sub 100 nm spatial resolution and has been incorporated into a photomask repair system operating in manufacturing. Better than 200 nm resolution in the femtosecond stimulated deposition of metals at atmospheric pressure has been achieved. 350.3850 320.2250

© 2003 Optical Society of America

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