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Optical Measurement of Depth and Duty Cycle for Binary Diffraction Gratings with Sub-Wavelength Features

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Abstract

Most grating measurement techniques either rely on sophisticated and expensive equipment1 or require the collection of a large amount of data from an elaborate experimental set-up.2 The basis of our measurement method3 hinges on what we define as the symmetric-order efficiency ratio (SOER), which is simply the ratio of the measured powers in the m = +1 and m = -1 diffracted orders. For this measurement technique, the grating is illuminated at an angle that is near normal incidence with linearly-polarized light, and the measured SOER is compared to rigorous coupled-wave theory.4

© 2003 Optical Society of America

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