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Conferences > FiO > 2004 > FMB > FMB3
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FMB3
  • •https://doi.org/10.1364/FIO.2004.FMB3

Optically Driven Deformable Mirror MEMS Spatial Light Modulator Under AC Bias Operation

J. Khoury, C. L. Woods, B. Haji-Saeed, S. K. Sengupta, D. B. Megherbi, W. Goodhue, and J. Kierstead

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Abstract

The operation of a new deformable mirror device for applications in adaptive optics and optical signal processing is described and analyzed. The device is electrically driven and optically addressed. Mirror deformation, with optical and electrical drive, derived from a theoretical model, is in reasonable agreement with interferometric measurements.

© 2004 Optical Society of America

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