Abstract

A Silicon On Insulator (SOI) photonic crystal superpris m has been designed using the plane -wave method and equi -frequency contours. Samples have been fabricated by 193 nm DU V lithography and RIE etching process. Optica l measurements performed around 1.33 µm show an optical dispersion of about 0.3 °/nm.

© 2004 Optical Society of America

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