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Conferences > FiO > 2004 > FMQ > FMQ6
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest Series (Optica Publishing Group, 2004),
  • paper FMQ6
  • •https://doi.org/10.1364/FIO.2004.FMQ6

Waveguide-coupled round-corner octagonal microresonator channel add-drop filters

Chao Li and Andrew W. Poon

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Abstract

We report the first waveguide-coupled round-corner octagonal microresonator channel add-drop filters on silicon-nitride-on-silica substrates. By using photolithography and plasma etching, we fabricated a waveguide-coupled 50-micron sized octagonal microresonator with 15-micron radius round corners. Our experiment reveals TM-polarized whispering-gallery-like modes with a Q of about 3800 and a finesse of 18.

© 2004 Optical Society of America

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