Abstract

We report the first waveguide-coupled round-corner octagonal microresonator channel add-drop filters on silicon-nitride-on-silica substrates. By using photolithography and plasma etching, we fabricated a waveguide-coupled 50-micron sized octagonal microresonator with 15-micron radius round corners. Our experiment reveals TM-polarized whispering-gallery-like modes with a Q of about 3800 and a finesse of 18.

© 2004 Optical Society of America

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription