Analysis of Fabrication Processes for Photonic Crystal MEMS/NEMS Structures

Kahraman D. Akdemir; Brian M. King

doi:10.1364/FIO.2005.FThF4

Frontiers in Optics
OSA Technical Digest Series (Optica Publishing Group, 2005),
paper FThF4
•https://doi.org/10.1364/FIO.2005.FThF4

Analysis of Fabrication Processes for Photonic Crystal MEMS/NEMS Structures

Kahraman D. Akdemir and Brian M. King

Frontiers in Optics 2005

Tucson, Arizona United States
16–21 October 2005
ISBN: 1-55752-797-0

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Novel Photonic Crystal Devices (FThF)

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K. D. Akdemir and B. M. King, "Analysis of Fabrication Processes for Photonic Crystal MEMS/NEMS Structures," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper FThF4.

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Abstract

Integrating photonic crystals with MEMS/NEMS structures requires a high level of fabrication analysis in order to achieve the desired outcome. Consequently, the effects of various fabrication methods on device performance must be considered.

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