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Development of Elliptical Kirkpatrick-Baez Mirrors for Hard X-Ray Nanofocusing

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Abstract

Ultraprecise fabrication and figure testing methods having sub-nm form accuracies were developed to make the aspherical K-B mirrors for hard X-ray nanofocusig. A 36nm × 48nm size focusing at 15keV hard X-ray was achieved at BL29-XUL of SPring-8.

© 2005 Optical Society of America

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