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Fabrication and characterization of air-trench waveguide beam splitters in perfluorocyclobutyl polymers

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Abstract

We report fabrication and characterization of small-area air-trench waveguide splitters in perfluorocyclobutyl polymers. An ICP/RIE anisotropic, high aspect ratio etch is developed using CO/O2 chemistry to fabricate air-trenches, preventing excessive widening with a stress relief method.

© 2006 Optical Society of America

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