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  • Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion
  • OSA Technical Digest (CD) (Optica Publishing Group, 2007),
  • paper FMH5
  • https://doi.org/10.1364/FIO.2007.FMH5

Measurement of Surface Profiles of An Objective Lens by Using Fine Projection Moire Method

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Abstract

We present a 3-D image measuring technology base to obtain surface profiles of objects using projection moire method, and demonstrate its performance by obtaining surface profiles of a lens with 40pm and 80μm fringe patterns.

© 2007 Optical Society of America

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