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  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper PDPB5
  • https://doi.org/10.1364/FIO.2008.PDPB5

GHz Micron-Scale Electro-optic Modulator in Deposited Polysilicon

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Abstract

We demonstrate 2.5 Gbps electro-optic modulation using microring resonators fabricated in a deposited thin film of polycrystalline silicon. This device is a critical building block for the 3D integration of high-performance integrated optical data networks.

© 2008 Optical Society of America

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