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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FMJ2
  • https://doi.org/10.1364/FIO.2009.FMJ2

In-plane all-photonic transduction of microcantilever arrays by a differential splitter using a double-step rib waveguide

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Abstract

We report the all-photonic transduction of microcantilevers using a differential splitter consisting of an asymmetric double-step multimode rib waveguide and aY-branch splitter. An average deflection sensitivity of 0.32×10−3 nm−1 is demonstrated for multiple microcantilever arrays.

© 2009 Optical Society of America

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