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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThE7
  • https://doi.org/10.1364/FIO.2009.FThE7

Fabrication of Rib Waveguides in Germanium-Selenium Chalcogenide Glass Through Electron Beam Direct Writing

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Abstract

We report the fabrication of direct write rib waveguides in Ge0.2Se0.8 chalcogenide glass films on thermally oxidized silicon substrates using electron beams. Numerical modeling of the fundamental TE mode yields an effective index of 2.0.

© 2009 Optical Society of America

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