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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FThT2
  • https://doi.org/10.1364/FIO.2009.FThT2

At-wavelength and optical metrology of bendable x-ray optics for nanofocusing at the ALS

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Abstract

We report on a new research and development program at the Advanced Light Source, Lawrence Berkeley National Lab directed to establish both at-wavelength and conventional optical metrology techniques suitable to characterize the surface profile of super-high-quality x-ray optics with sub-microradian precision.

© 2009 Optical Society of America

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