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  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper FTuZ2
  • https://doi.org/10.1364/FIO.2009.FTuZ2

Nanoscale Microscopy with Table-Top Extreme Ultraviolet Lasers

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Abstract

We describe the successful implementation of full-field microscopes based on λ=13.2 nm and λ= 46.9 nm table-top lasers that can image nanostructures in transmission and reflection modes with a spatial resolution of ∼50 nm.

© 2009 Optical Society of America

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