Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Not Accessible

Your library or personal account may give you access

Abstract

We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.

© 2010 Optical Society of America

PDF Article
More Like This
Demonstration of a Self Aligned Hybrid Silicon-Plasmonic Waveguide with Low Loss and Nanoscale Confinement

Boris Desiatov, Ilya Goykhman, and Uriel Levy
JTh2A.24 National Fiber Optic Engineers Conference (NFOEC) 2012

Ultra-high Q silicon resonators in planarized LOCOS

Alex Naiman, Boris Desiatov, Liron Stern, Noa Mazurski, Joseph Shappir, and Uriel Levy
STh3G.3 CLEO: Science and Innovations (CLEO:S&I) 2015

All-optical amplitude-based broadband modulation in submicron silicon waveguide

Ilya Goykhman, Boris Desiatov, and Uriel Levy
FMH5 Frontiers in Optics (FiO) 2010

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved