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Conferences > FiO > 2010 > FThQ > FThQ5

High-Q Etchless Silicon Ring Resonator

Lian-Wee Luo, Gustavo S. Wiederhecker, Jaime Cardenas, and Michal Lipson

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Abstract

We demonstrate high-Q silicon ring resonators fabricated by selective oxidation without any silicon etching. We achieve an intrinsic quality factor of 480,000 in 50 µm radii rings with ring losses of 0.9 dB/cm.

© 2010 Optical Society of America

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