Influence of oxygen pressure variations on the optical properties of ion beam sputtered metal oxide coatings

P. Langston; D. Patel; B. Regan; B. Regan; A. Curtis; A. Curtis; B. Luther; B. Luther; A. Markosyan; R. K. Route; M. M. Fejer; J. J. Rocca; J. J. Rocca; C. S. Menoni; C. S. Menoni

doi:10.1364/FIO.2011.JWA25

Frontiers in Optics 2011/Laser Science XXVII
OSA Technical Digest (Optica Publishing Group, 2011),
paper JWA25
•https://doi.org/10.1364/FIO.2011.JWA25

Influence of oxygen pressure variations on the optical properties of ion beam sputtered metal oxide coatings

P. Langston, D. Patel, B. Regan, A. Curtis, B. Luther, A. Markosyan, R. K. Route, M. M. Fejer, J. J. Rocca, and C. S. Menoni

Frontiers in Optics 2011

San Jose, California United States
16–20 October 2011
ISBN: 978-1-55752-917-6

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FiO/LS Joint Poster Session II (JWA)

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P. Langston, D. Patel, B. Regan, A. Curtis, B. Luther, A. Markosyan, R. K. Route, M. M. Fejer, J. J. Rocca, and C. S. Menoni, "Influence of oxygen pressure variations on the optical properties of ion beam sputtered metal oxide coatings," in Frontiers in Optics 2011/Laser Science XXVII, OSA Technical Digest (Optica Publishing Group, 2011), paper JWA25.

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Abstract

Small variations of oxygen partial pressure during the ion beam sputtering of metal oxides strongly influence the optical properties, causing an increase in the absorption loss and a decrease in laser damage fluence.

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