Simulation of Photonic-Crystal Devices Fabricated via Pattern-Integrated Interference Lithography

Matthieu C. R. Leibovici; Thomas K. Gaylord

doi:10.1364/FIO.2013.FW1F.5

Frontiers in Optics 2013
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper FW1F.5
•https://doi.org/10.1364/FIO.2013.FW1F.5

Simulation of Photonic-Crystal Devices Fabricated via Pattern-Integrated Interference Lithography

Matthieu C. R. Leibovici and Thomas K. Gaylord

Frontiers in Optics 2013

Orlando, Florida United States
6–10 October 2013
ISBN: 978-1-55752-987-9

From the session
Three-Dimensional Optical Structure I (FW1F)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
M. C. R. Leibovici and T. K. Gaylord, "Simulation of Photonic-Crystal Devices Fabricated via Pattern-Integrated Interference Lithography," in Frontiers in Optics 2013, I. Kang, D. Reitze, N. Alic, and D. Hagan, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper FW1F.5.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Pattern-Integrated Interference Lithography (PIIL) couples interference and imaging lithography to produce pattern-integrated periodic microstructures in a single exposure. Mask optimization mitigates lattice distortion. PIIL-produced devices exhibit promising performance.

PDF Article

More Like This

Pattern-Integrated Interference Lithography for 2D and 3D Photonic Crystals

Thomas K. Gaylord and Matthieu C. R. Leibovici
FTh2F.1 Frontiers in Optics (FiO) 2013

Simulation of Photonic-Crystal Devices Fabricated by Pattern-Integrated Interference Lithography

Matthieu C. R. Leibovici and Thomas K. Gaylord
FW1A.6 Frontiers in Optics (FiO) 2014

Three-Dimensional Periodic Structures via Pattern-Integrated Interference Lithography

Matthieu C. R. Leibovici and Thomas K. Gaylord
FW1A.4 Frontiers in Optics (FiO) 2014

Previous Article Next Article