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Conferences > FiO > 2014 > FTh4G > FTh4G.4

Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

Brian K. Canfield, Trevor S. Bowman, Lino Costa, Deepak Rajput, Alexander Terekhov, William H. Hofmeister, and Lloyd M. Davis

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Abstract

Exceptionally deep submicron-diameter holes and long microchannels are machined in fused silica by single femtosecond pulses using spherical, cylindrical, and aspheric lenses. These features result from a combination of longitudinal spherical aberration and filamentation.

© 2014 Optical Society of America

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