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Conferences > FiO > 2014 > FW4A > FW4A.6

Throughput enhancement in femtosecond laser ablation of silicon by N-type doping

Juqiang Fang and Qiang Cao

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Abstract

Experiments show femtosecond laser ablation enhancement of silicon through N-type doping. We found that the material removal is affected by doping concentrations rather than doping types, due to initial free electron density.

© 2014 Optical Society of America

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