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Conferences > IPRSN > 2018 > ITh2B > ITh2B.4

High precision transfer printing for hybrid integration of multi-material waveguide devices

John R. McPhillimy, Benoit Guilhabert, Charalambos Klitis, Stuart May, Martin D. Dawson, Marc Sorel, and Michael J. Strain

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Abstract

We present a transfer printing technique with sub-100nm absolute placement accuracy. Hybrid integration of pre-processed membrane waveguide devices is achieved across a range of materials, including silicon, polymer and III-V devices.

© 2018 The Author(s)

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