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Conferences > ISA > 2016 > ITh1F > ITh1F.2

Off-axis aberration estimation in an EUV microscope using natural speckle

Aamod Shanker, Antoine Wojdyla, Gautam Gunjala, Jonathan Dong, Markus Benk, Andy Neureuther, Kenneth Goldberg, and Laura Waller

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Abstract

Surface roughness on a flat object causes natural speckle when imaged by an extreme ultraviolet (EUV) microscope under sufficient coherence. Using a phase-to-intensity transfer function theory, direct estimation of aberrations from the spectrum of the speckle intensity is demonstrated for various illumination angles.

© 2016 Optical Society of America

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