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Conferences > LS > 2019 > JW4A > JW4A.103

Measuring the topography of microelements by synthetic longitudinal spatial coherence function

J. Martinez-Carranza, M. Mikuła, and T. Kozacki

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Abstract

This work presents a new technique for measuring the topography by using synthetic longitudinal spatial coherence function. This approach allows obtaining high axial resolution and extending the unambiguous measurement range in digital holography.

© 2019 The Author(s)

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