Broadband and Polarization Insensitive Surface Optical Coupler Using Vertically Curved Waveguides Fabricated with ArF-immersion Lithography

T. Yoshida; Y. Atsumi; E. Omoda; Y. Sakakibara

doi:10.1364/OFC.2019.Tu2J.7

Optical Fiber Communication Conference 2019

San Diego, California United States
3–7 March 2019
ISBN: 978-1-943580-53-8

From the session
Filters and Couplers (Tu2J)

Broadband and Polarization Insensitive Surface Optical Coupler Using Vertically Curved Waveguides Fabricated with ArF-immersion Lithography

T. Yoshida, Y. Atsumi, E. Omoda, and Y. Sakakibara

Optical Fiber Communication Conference (OFC) 2019
OSA Technical Digest (Optical Society of America, 2019),
paper Tu2J.7
•https://doi.org/10.1364/OFC.2019.Tu2J.7

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T. Yoshida, Y. Atsumi, E. Omoda, and Y. Sakakibara, "Broadband and Polarization Insensitive Surface Optical Coupler Using Vertically Curved Waveguides Fabricated with ArF-immersion Lithography," in Optical Fiber Communication Conference (OFC) 2019, OSA Technical Digest (Optical Society of America, 2019), paper Tu2J.7.

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Abstract

Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.

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Optical Fiber Communication Conference 2019

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