Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Broadband and Polarization Insensitive Surface Optical Coupler Using Vertically Curved Waveguides Fabricated with ArF-immersion Lithography

Not Accessible

Your library or personal account may give you access

Abstract

Vertically-curved Si waveguide fabricated using 45nm-node ArF-immersion lithography and ion implantation bending method showed <2.5dB minimum coupling loss, >130nm/0.5dB spectrum bandwidth for 5μm-MFD fiber coupling in both TE- and TM-polarization with very small polarization dependence.

© 2019 The Author(s)

PDF Article
More Like This
Polarization-insensitive broadband 3dB optical power splitter based on silicon curved directional coupler with rib waveguide

Di Zheng, Yanhao Ma, Wei Pan, and Xihua Zou
M4A.266 Asia Communications and Photonics Conference (ACP) 2019

Characterization of Coupling Properties of Vertically Curved Si Surface Optical Coupler Designed for Coupling with 5-µm-MFD SMF

Y. Atsumi, T. Yoshida, E. Omoda, and Y. Sakakibara
Tu2A.2 Optical Fiber Communication Conference (OFC) 2018

Large Mode-Field-Diameter Surface Optical Coupler Based on SiO2-Capsuled Vertically Curved Si Waveguide

Y. Atsumi, T. Yoshida, E. Omoda, and Y. Sakakibara
Th2A.8 Optical Fiber Communication Conference (OFC) 2017

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved