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Conferences > OFT > 2004 > OMD > OMD3
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OMD3
  • •https://doi.org/10.1364/OFT.2004.OMD3

Recent achievements on ion beam techniques for optics fabrication

A. Schindler, T. Hänsel, F. Frost, A. Nickel, R. Fechner, and B. Rauschenbach

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Abstract

The talk gives an overview on latest results on ion beam technology development for optics fabrication: RIBE proportional transfer of 3D micro- and nanostructures, smoothing down to the 0.1nm rms range and figuring below 0.5nm rms.

© 2004 Optical Society of America

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