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Conferences > OFT > 2004 > OMD > OMD5
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OMD5
  • •https://doi.org/10.1364/OFT.2004.OMD5

Ion beam figuring surface finishing of x-ray and synchrotron beam line optics using stitching interferometry for the surface topology measurement

T. Hänsel, A. Nickel, A. Schindler, and H.-J. Thomas

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Abstract

Deterministic surface finishing using small spot ion beam figuring combined with stitching interferometry surface shape measurements for enhanced spatial resolution have been developed to achieve 20marcsec slope error on a 100mm flat Si synchrotron beam line optic.

© 2004 Optical Society of America

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