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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuB1
  • https://doi.org/10.1364/OFT.2004.OTuB1

Leveraging interferometric metrology for precision manufacturing

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Abstract

Commercial interferometers can be both quite accurate and easy to use. Advanced surface specifications and manufacturing techniques, however, require a greater awareness of gauge capabilities. We discuss how to critically analyze metrology for such situations.

© 2004 Optical Society of America

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