Abstract
We discuss the use of power spectral density (PSD) analysis to characterize an optical surface. PSD analysis was performed on different sections of a magnetorheological finishing (MRF) spot on chemical vapor deposition (CVD) Zinc Sulfide (ZnS). PSD was also used to examine CVD ZnS surfaces that were pitch-polished, diamond turned or rotationally polished with MRF.
© 2004 Optical Society of America
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