Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Quantitative Calculation of Substrate Bending Caused by Multilayer Thin Film Stress

Not Accessible

Your library or personal account may give you access

Abstract

Substrate bending by multilayer coating of Ta2O5/SiO2 has been investigated quantitatively. By introducing fitting parameters to modified Stoney’s formula, the amount of the bending has been calculated to accuracies of less than 𝜆⁄10 at 633nm.

© 2019 The Author(s)

PDF Article
More Like This
Investigation of the Anisotropic Stress of the Anti-reflector Multilayer Film Deposited on PET Flexible Substrate

Hsi-Chao Chen, Chun-Hao Chang, Yu-Ru Lu, Sheng-Bin Chen, Cheng-Xuan Wu, and Ching-Chieh Hung
WC.9 Optical Interference Coatings (OIC) 2019

Stress in Multilayers and Thin Films

C. A. Volkert, D. L. Windt, W. K. Waskiewicz, J. A. Liddle, and H. A. Huggins
WA.2 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994

Laser Induced Thermal Stress in Optical Thin Films

Austin Firth and Uma Srinivasan
ThB.8 Optical Interference Coatings (OIC) 2019

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved