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Plasmonic Antireflective Structures with SiO2 Nanocolumns Fabricated by Oblique Angle Deposition

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Abstract

SiO2 nanocolumns as spacers are introduced into plasmonic antireflective structure by oblique angle deposition. Different deposition angles determine the morphology of SiO2 and the size distributions of Ag particles, which results in different reflections.

© 2017 Optical Society of America

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