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Suspended Microring Resonator Sensor using Internal Sub-Wavelength Grating

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Abstract

A fully suspended microring resonator sensor supported by a sub-wavelength grating is proposed. Sensitivity of 503nm/RIU and Q-factor of 75k are predicted for a resonator with 450nm-period grating. Q=29k is measured for an unsuspended resonator.

© 2015 Optical Society of America

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