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A miniaturized non-dispersive infrared CO2 sensor based on a 2D integrating cylinder

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Abstract

We propose a novel, miniaturized NDIR CO2 sensor based on a 2D integrating cylinder, realized using deep RIE and wafer bonding on silicon. The sensor has a detection limit down to 250ppm, with a small footprint of only 5mm × 5mm.

© 2019 The Author(s)

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