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Quantitative calculation of substrate bending caused by multilayer coating stresses

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Abstract

A framework to quantitatively calculate substrate bending after coating has been proposed. By introducing fitting parameters to modified Stoney’s formula, the amount of bending has been calculated to accuracies of less than ${{\boldsymbol\lambda} / {10}}$ at 633 nm for ion-beam sputtering and ion-beam assisted deposition processes.

© 2019 Optical Society of America

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