Tunable optical properties of plasmonic Au/Al<sub>2</sub>O<sub>3</sub> nanocomposite thin films analyzed by spectroscopic ellipsometry accounting surface characteristics

Jyoti Jaiswal; Satyendra Mourya; Gaurav Malik; Ramesh Chandra

doi:10.1364/JOSAA.35.000740

Journal of the Optical Society of America A
Vol. 35,
Issue 5,
pp. 740-747
(2018)
•https://doi.org/10.1364/JOSAA.35.000740

Tunable optical properties of plasmonic Au/Al₂O₃ nanocomposite thin films analyzed by spectroscopic ellipsometry accounting surface characteristics

Jyoti Jaiswal, Satyendra Mourya, Gaurav Malik, and Ramesh Chandra

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Jyoti Jaiswal, Satyendra Mourya, Gaurav Malik, and Ramesh Chandra, "Tunable optical properties of plasmonic Au/Al₂O₃ nanocomposite thin films analyzed by spectroscopic ellipsometry accounting surface characteristics," J. Opt. Soc. Am. A 35, 740-747 (2018)

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Abstract

In the present work, we have fabricated plasmonic gold/alumina nanocomposite ( $Au / {Al}_{2} O_{3}$ NC) thin films on a glass substrate at room temperature by RF magnetron co-sputtering. The influence of the film thickness ( $\sim 10 - 40 nm$ ) on the optical and other physical properties of the samples was investigated and correlated with the structural and compositional properties. The X-ray diffractometer measurement revealed the formation of Au nanoparticles with average crystallite size (5–9.2 nm) embedded in an amorphous ${Al}_{2} O_{3}$ matrix. The energy-dispersive X ray and X-ray photoelectron spectroscopy results confirmed the formation of $Au / {Al}_{2} O_{3}$ NC quantitatively and qualitatively and it was observed that atomic% of Au increased by increasing thickness. The optical constants of the plasmonic $Au / {Al}_{2} O_{3}$ NC thin films were examined by variable angle spectroscopic ellipsometry in the wide spectral range of 246–1688 nm, accounting the surface characteristics in the optical stack model, and the obtained results are expected to be unique. Additionally, a thickness-dependent blueshift (631–590 nm) of surface plasmon resonance peak was observed in the absorption spectra. These findings of the plasmonic $Au / {Al}_{2} O_{3}$ NC films may allow the design and fabrication of small, compact, and efficient devices for optoelectronic and photonic applications.

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Sputtering Parameters
Targets	Au	${Al}_{2} O_{3}$
Substrates	Glass
Base pressure (Torr)	$3 \times 10^{- 6}$
Working pressure (mTorr)	5
Deposition time (min)	3–12
Deposition power (W)	2	150
Substrate temperature	RT
Target-substrate distance (cm)	8
Gas Used (sccm)	Ar:20

Structural, Morphological, and Compositional Properties		Samples
Structural, Morphological, and Compositional Properties		NC1	NC2	NC3	NC4
$D$ ( $\sim nm$ )	SEM	10	20	30	40
	SE	$8.71 \pm 0.43$	$17.94 \pm 0.48$	$28.25 \pm 0.83$	$38.82 \pm 0.69$
$t$ (nm)		5	6.2	7.5	9.2
$d$ (nm)		2.367	2.364	2.360	2.354
$ϵ$ (%)		0.723	0.595	0.425	0.170
$δ_{rms}$ (nm)	AFM	1.16	2.15	4.22	6.98
	SE	$1.03 \pm 0.28$	$1.99 \pm 0.11$	$3.57 \pm 0.24$	$5.41 \pm 0.15$
Atomic % of Au	EDX	10.76	11.61	12.46	14.35
	XPS	9.61	10.98	11.79	14.03
Volume fraction of Au (%)		$18.8 \pm 0.18$	$20.4 \pm 0.23$	$22.3 \pm 0.21$	$24.9 \pm 0.19$

		Samples
Optical Properties		NC1	NC2	NC3	NC4
Refractive index $n$	$λ = 540 nm$	1.657	1.612	1.497	1.459
Refractive index $n$	$λ = 633 nm$	2.254	2.098	1.947	1.895
Extinction coefficient $k$	$λ = 540 nm$	1.100	1.199	1.297	1.363
Extinction coefficient $k$	$λ = 632 nm$	1.404	1.517	1.658	1.741
Real dielectric constant $ϵ_{1}$	$λ = 540 nm$	1.538	1.161	0.561	0.272
Real dielectric constant $ϵ_{1}$	$λ = 632 nm$	3.112	2.102	1.042	0.559
Imaginary dielectric constant $ϵ_{2}$	$λ = 540 nm$	3.647	3.870	3.885	3.979
Imaginary dielectric constant $ϵ_{2}$	$λ = 632 nm$	6.331	6.369	6.458	6.604
SPR $λ_{\max}$ (nm)		631	620	605	590
FWHM (nm)		113	102	90	79

Sputtering Parameters
Targets	Au	${Al}_{2} O_{3}$
Substrates	Glass
Base pressure (Torr)	$3 \times 10^{- 6}$
Working pressure (mTorr)	5
Deposition time (min)	3–12
Deposition power (W)	2	150
Substrate temperature	RT
Target-substrate distance (cm)	8
Gas Used (sccm)	Ar:20

Structural, Morphological, and Compositional Properties		Samples
Structural, Morphological, and Compositional Properties		NC1	NC2	NC3	NC4
$D$ ( $\sim nm$ )	SEM	10	20	30	40
	SE	$8.71 \pm 0.43$	$17.94 \pm 0.48$	$28.25 \pm 0.83$	$38.82 \pm 0.69$
$t$ (nm)		5	6.2	7.5	9.2
$d$ (nm)		2.367	2.364	2.360	2.354
$ϵ$ (%)		0.723	0.595	0.425	0.170
$δ_{rms}$ (nm)	AFM	1.16	2.15	4.22	6.98
	SE	$1.03 \pm 0.28$	$1.99 \pm 0.11$	$3.57 \pm 0.24$	$5.41 \pm 0.15$
Atomic % of Au	EDX	10.76	11.61	12.46	14.35
	XPS	9.61	10.98	11.79	14.03
Volume fraction of Au (%)		$18.8 \pm 0.18$	$20.4 \pm 0.23$	$22.3 \pm 0.21$	$24.9 \pm 0.19$

Abstract

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Journal of the Optical Society of America A