Abstract

Ellipsometric measurements at 10.6 μm using a modulated light ellipsometer and ellipsometer and reflectometer measurements at 0.6328 μm are reported for the refractive indices of As2S3, As2Se3, and ZnS films deposited on KCl substrates. The observation of strain-induced anisotropy is reported, and an analysis of the effects of anisotropy in thin film ellipsometry is presented.

© 1979 Optical Society of America

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