Abstract

The fabrication of optical waveguide couplers involving tapered layers of is discussed. Details of the SiO2 photolithographic fabrication processing sequence are presented. This process utilizes carefully controlled etchant undercutting and has been found to be quite reproducible. It has allowed fabrication of tapers having changes in SiO2 thickness of 1.0 μm over lengths of 55–75 μm. Results are presented which demonstrate taper transverse uniformity for distances of over 600 μm. The smoothness and gradual nature of the tapers are apparent in scanning electron microscope pictures of a taper cross section.

© 1979 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Waveguide–detector couplers for integrated optics and monolithic optoelectronic switching arrays

Gary Mak, Douglas M. Bruce, and Paul E. Jessop
Appl. Opt. 28(21) 4629-4636 (1989)

Fabrication and characterization of suspended SiO2 ridge optical waveguides and the devices

Pengxin Chen, Yunpeng Zhu, Yaocheng Shi, Daoxin Dai, and Sailing He
Opt. Express 20(20) 22531-22536 (2012)

Grating coupler acceptance design utilizing a tapered waveguide structure

Thomas A. Strasser, Wei Yung Hsu, and Mool C. Gupta
Appl. Opt. 32(30) 6006-6017 (1993)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription