Abstract

A new type of interferometric measuring technique has been developed to make precise measurements of periphery surface shapes, such as toroidal surfaces and raceway surfaces of bearings. The measuring apparatus consists of a Fizeau interferometer, a rotating air spindle unit, and a microcomputer system. The raceway shape along the cross section is measured at each rotating angle until the entire surface data are stored in the computer memory. The fringe data at each angle are displayed two dimensionally using a TV frame memory to obtain a peri-interferogram. The surface of a 6203 inner ball bearing raceway can be measured successfully with an accuracy of within 100 nm.

© 1985 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Single-step spatial rotation error separation technique for the ultraprecision measurement of surface profiles

Maosheng Hou, Lirong Qiu, Weiqian Zhao, Fan Wang, Entao Liu, and Lin Ji
Appl. Opt. 53(3) 487-495 (2014)

Stylus profiling at high resolution and low force

J. F. Song and Theodore V. Vorburger
Appl. Opt. 30(1) 42-50 (1991)

Stylus profiling instrument for measuring statistical properties of smooth optical surfaces

J. M. Bennett and J. H. Dancy
Appl. Opt. 20(10) 1785-1802 (1981)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (16)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription