Abstract

An investigation was conducted on the VUV radiation from laser-produced plasmas using a channel electron multiplier detector and a 1.5-m grazing incidence spectrometer. High-resolution quantitative spectra from 8 to 40 nm were obtained from the plasmas generated by a 0.5-J Nd:YAG laser focused on nine different target materials. The effects on the plasma emission of laser energy and focus were measured.

© 1986 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Debris and VUV emission from a laser-produced plasma operated at 150 Hz using a krypton fluoride laser

Marshall L. Ginter and Thomas J. McIlrath
Appl. Opt. 27(5) 885-889 (1988)

Rare-earth plasma light source for VUV applications

G. O’Sullivan, P. K. Carroll, T. J. Mclirath, and M. L. Ginter
Appl. Opt. 20(17) 3043-3046 (1981)

Soft x-ray lithography using radiation from laser-produced plasmas

P. Gohil, H. Kapoor, D. Ma, M. C. Pekerar, T. J. Mcllrath, and M. L. Ginter
Appl. Opt. 24(13) 2024-2027 (1985)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription