Abstract

A toroidal relay optic has been used to overcome the problem of damage caused by debris that has limited previous attempts at soft x-ray lithography and contact microscopy using laser-produced plasma sources. Not only is the specimen preserved, but it is now possible to have a vacuum retaining soft x-ray transparent Si3N4 window as a permanent part of the apparatus, greatly simplifying specimen handling. The exposure times are ∼2 ns.

© 1987 Optical Society of America

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