Codeposition of continuous composition rugate filters

Abstract

Rugate filters are optical thin film interference structures with sinusoidal refractive index profiles. Two-wavelength reflection filters have been fabricated by codeposition of SiO₂ and TiO₂. Composition modulation was monitored and controlled using quartz crystal rate controllers. The resulting filters exhibited two well-defined stopbands. Microscopic examination revealed that the structure is glasslike without pronounced thin film microstructure.

© 1989 Optical Society of America

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