Abstract

An investigation of four alternative radiometric algorithms for dynamic imaging microellipsometry (a rapid full field imaging technique for thin films) is reported. Three exact solutions and a Fourier series approach are presented and compared in terms of random and systematic errors and processing requirements. Variations in performance based on assumed system specifications are of the order of 0.3 and 0.06° rms random error for Δ and ψ, respectively, with systematic error differences around 0.4° for Δ and 0.15° for ψ. Processing requirements are generally similar. The three-image algorithms are recommended for high speed applications and the Fourier series for high accuracy.

© 1990 Optical Society of America

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